Pumping speed from 2.2 to 71.6m³/h
Suitable for 100~460V, 1 and 3 phase power supply
Low noise or vibration
High efficiency, easy maintenance
No oil contamination of vacuum chamber or environment
Completely environment friendly and pollution free
The GWSP series oil free scroll vacuum pumps are suitable for clean processes only.
Do not pump toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents, or particles. StreamPumps will not perform maintenance work on pumps which have used special gases or other hazardous substances.
Be sure the inlet gas temperature must be lower than 122 °F (50 oC).
· Pumping Speed (60Hz): 4.3 [m3/h], 1.2 [L/s], 2.5 [cfm];
· Pumping Speed (50Hz): 3.6 [m3/h], 1.0 [L/s], 2.1 [cfm];
· Ultimate Pressure: ≤6.0^10-2 [Torr], ≤1.2^10-3 [psi], ≤8.0^10-2 [mbar], ≤8.0 [Pa];
· Noise Level: ≤57.0 [dB(A)];
· Leakage: 1.0^10-7 [mbar ▪ L/s];
· Max. Inlet/Exhaust Pressure: 1/1.3 [atm];
· Ambient Operation Temperature: 41~104 [oF], 5 ~ 40 [oC];
· Motor 1 phase:
o Power: 0.25 [kW];
o Voltage: 110~115 [V] (60Hz), 200~230 [V] (50Hz);
o Speed: 1725[rpm] (60Hz), 1425 [rpm] (50Hz);
o Plug Standard: North America, Europe, UK/Ireland, India
· Motor 3 phase:
o Power: 0.37 [kW];
o Voltage: 200~230V or 460V (60Hz) | 200~230V or 380~415V (50Hz);
o Speed: 1725[rpm] (60Hz), 1425 [rpm] (50Hz);
· Inlet/Exhaust Flange: KF25/KF16
· Dimensions: 17.7 * 10.2 * 11.7[Inch], 450 * 260 * 296[mm]
· Weight: 46lbs, 21kg;
Instrument:
Surface analysis, Leak detection, Mass spectrometry, Electron microscopy, Residual gas analysis, Plasma monitoring, Inspection, Oil free ultrahigh vacuum station;
Semiconductor:
Lithography, Plasma etching, Cryogenics, Implantation-source, Implantation-beamline, Bonding, MBE (Molecular beam epitaxy), PVD (Physical vapor deposition), CVD (Chemical vapor deposition), Load lock, transfer chamber;
Coating:
FPD (Flat panel display), LED/OLED, Hard disk coating, Photovoltaics, Glass coating (PVD), Blu-ray production (PVD), Optical coating (PVD), Wear protection coating, Web coating, Decoration coating
Industry:
Vacuum sterilizer, Vacuum freeze drying, E-beam / laser welding, 3D metal printing, Vacuum furnace, Lamp & tube manufacturing, Lithium battery dry & packing, Vacuum heat treatment, Vacuum packing, Vacuum drying, Vacuum degassing
Research & Development:
Nuclear research, Fusion research, Plasma research, Accelerator synchrotron, Space simulation, Cryogenic research, Nanotechnology, Biotechnology, Elementary particle physics
Pumping speed from 2.2 to 71.6m³/h
Suitable for 100~460V, 1 and 3 phase power supply
Low noise or vibration
High efficiency, easy maintenance
No oil contamination of vacuum chamber or environment
Completely environment friendly and pollution free